|
 Ablation
of thin films
Precise, local ablation of thin layers of material is finding its
way into many different areas of industrial production. The basis
of all these applications is an ablation process that is characterized
by short, high-energy laser pulses that cause ablation of the material.
The lasers used are Q-switched solid-state lasers that still provide
high pulse power and excellent beam quality at pulse rates of several
10 kHz. In the case of thin-layer structuring, the typical microstructures
are 10-100 µm wide, and the ablated layers are 0.1 - 3 µm
thick, and created by a single scan. Thin-layer structuring with
lasers is used, for example, in photovoltaic manufacturing processes
for manufacturing flat screens or projection masks.
Lasers
Lamp pumped Lasers: SMP
100
Diode pumped Lasers: Nd:YAG: PowerLine
D, 30 SHG, 100 SHG Nd:Vanadate: PowerLine
E
|
